1. Vacuum pump thermal overload protection, please check the circuit and vacuum pump fault

（1）When this happens, please first observe whether the system parameters have changed. The sudden power failure of the equipment will cause the system parameters to return to zero, resulting in such an alarm in the equipment.

（2） If the system parameters do not change, please confirm whether the thermal relay is automatically protected, press the reset button, and then start the vacuum generation system. If there is no automatic protection, please check whether there is a short circuit or open circuit in the electrical circuit.

（3）Check whether there is a short circuit or open circuit in the electrical circuit.

（4）If there is no abnormality above, please check the vacuum pump.

2. The venting gas pressure is too low, please check whether the gas is turned on or the gas is exhausted

（1） If such an alarm occurs, please check whether the solenoid valve of the air circuit used for breaking the vacuum at the bottom of the cavity is working normally, and whether there is a short circuit or open circuit in the circuit.

3. Vacuum pump failure (mechanical failure), please check the evacuation capacity of the vacuum pump, and click the reset button for troubleshooting.

（1）The product to be treated has serious water seepage, and the vacuum time equipment is short, and the back vacuum cannot be pumped within the equipment time.

（2）Check that the vacuum door is closed properly.

（3） Check each connection point in the vacuum system step by step to see if there is any poor or damaged pipeline connection.

（4）The vacuum pump is faulty, and the vacuum pump needs to be checked and maintained.

4. the vacuum failure alarm, the vacuum gauge is faulty or damaged, please check and replace the vacuum gauge

（1）Check whether the vacuum gauge is damaged, and check whether the control circuit of the vacuum gauge is short-circuited or open-circuited.

5. The emergency stop has not been reset or has been pressed, please turn on the emergency stop switch

（1） Check whether the emergency stop is pressed, if not, please check the emergency stop circuit.

6. CDA pressure is too low alarm (low air pressure)

（1）This alarm is an alarm that the compressed air pressure is insufficient. It mainly occurs in equipment equipped with a high vacuum pneumatic damper valve (GDQ). When this alarm occurs, it is necessary to check whether the CDA is normally supplying air to the equipment.

（2）Confirm whether the air supply pressure is too high or too low, and whether the alarm value of the decompression gauge is set correctly.

（3）Check whether there is a short circuit or open circuit in the electrical circuit.

The above are common plasma cleaning machine faults and alarm methods